# Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures with Self‐Recognition Algorithms

https://mdr.nims.go.jp/datasets/0558b0ac-a8c1-4bb2-b228-2a4b9617837e

## File

- [AMT-Diamond multifunctional sensor-20240403-clean.docx](https://mdr.nims.go.jp/filesets/02b601ee-1ca7-4f84-9095-3d861e34e546/download) ([Detail](https://mdr.nims.go.jp/filesets/02b601ee-1ca7-4f84-9095-3d861e34e546.md))

## Id

0558b0ac-a8c1-4bb2-b228-2a4b9617837e

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-07-14T09:18:31.162847Z

## Updated at

2025-04-30T03:30:06.838478Z

## Published at

2025-04-29T23:24:02.866376Z

## Doi

https://doi.org/10.48505/nims.4591

## First published url

https://doi.org/10.1002/admt.202400153

## Date published

2024-04-30

## Recorded date published

2024-7

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures
    with Self‐Recognition Algorithms
  title_type: original
  lang: en

## Description

- description: Nearly all sensors inevitably suffer from environmental influence such
    as temperature fluctuation. To precisely process the external signals, independent
    temperature compensation devices or electronic circuits are usually required,
    making the overall system and algorithms sophisticated. Especially, when the environment
    temperature is as high as over 200 °C, both the sensors and temperature-compensation
    devices encounter the reliability problem. In this work, an intelligent multifunctional
    sensor utilizing single-crystal diamond (SCD) microelectromechanical (MEMS) resonators
    is demonstrated that can sense both magnetic fields and temperatures up to 300
    °C, independently. The strategy is to integrate a magnetostrictive thin film and
    a non-magnetic thin film on different diamond MEMS resonators on the same diamond
    chip for simultaneous magnetic field sensing and temperature monitoring, respectively.
    The multi-resonators based on diamond MEMS offer a promising platform for multi-parameter
    sensing immune to environment interference.
  description_type: abstract
  lang: und

## Creator

- name: Zilong Zhang
  role: author
- name: Keyun Gu
  role: author
- name: Guo Chen
  role: author
- name: Liwen Sang
  role: author
- name: Tokuyuki Teraji
  role: author
  orcid: https://orcid.org/0000-0002-7731-0547
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
- name: Masaya Toda
  role: author
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: Wiley

## Managing organization



## Keyword

- subject: Diamond, MEMS
  schema: not_defined

## Rights

- description: 'This is the peer reviewed version of the following article: Zhang,
    Z., Gu, K., Chen, G., Sang, L., Teraji, T., Koide, Y., ... & Liao, M. (2024).
    Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures
    with Self‐Recognition Algorithms. Advanced Materials Technologies, 2400153., which
    has been published in final form at https://doi.org/10.1002/admt.202400153 This
    article may be used for non-commercial purposes in accordance with Wiley Terms
    and Conditions for Use of Self-Archived Versions. This article may not be enhanced,
    enriched or otherwise transformed into a derivative work, without express permission
    from Wiley or by statutory rights under applicable legislation. Copyright notices
    must not be removed, obscured or modified. The article must be linked to Wiley’s
    version of record on Wiley Online Library and any embedding, framing or otherwise
    making available the article or pages thereof by third parties from platforms,
    services and websites other than Wiley Online Library must be prohibited.'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-04-30
end_date: 2025-04-30

## Journal

- title: Advanced Materials Technologies
  issn: 2365709X
  volume: '9'
  issue: '13'
  article_number: '2400153'

## Conference



## Related item



## Funding

- funder_name: Kementerian Pendidikan
- funder_name: Ministry of Education, Culture, Sports, Science and Technology

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 02b601ee-1ca7-4f84-9095-3d861e34e546
  filename: AMT-Diamond multifunctional sensor-20240403-clean.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 2545897
  md5: 221c8377691dddd6ae5575b04ec7822e

## Thumbnail

fileset_id: 02b601ee-1ca7-4f84-9095-3d861e34e546
filename: AMT-Diamond multifunctional sensor-20240403-clean.docx