Article 放射光X線CT技術を駆使した高信頼性電子デバイス材料設計のための3次元解析:積層セラミックコンデンサ(MLCC)の電極構造形成プロセス

大熊 学 SAMURAI ORCID (構造材料研究センター/材料創製分野/セラミックス基複合材料グループ, 物質・材料研究機構ROR) ; 若井 史博 SAMURAI ORCID (構造材料研究センター/材料創製分野/セラミックス基複合材料グループ, 物質・材料研究機構ROR)

粉体および粉末冶金7月_大熊_2024.pdf
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大熊 学, 若井 史博. 放射光X線CT技術を駆使した高信頼性電子デバイス材料設計のための3次元解析:積層セラミックコンデンサ(MLCC)の電極構造形成プロセス. 粉体および粉末冶金 Journal of the Japan Society of Powder and Powder Metallurgy. 2024, 71 (7), 251-256.
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(abstract)

Synchrotron X-ray nano computed tomography was employed to study how the microstructure changes during the co-sintering process of multi-layer ceramic capacitors (MLCC). MLCCs are composed of alternating Ni electrodes and BaTiO3 dielectric layers. When the thickness of the electrodes was reduced to submicron levels, on the order of a few particle diameters, it led to the development of defects in the inner electrodes, resulting in a loss of capacitance. The discontinuous electrode region contained circular holes and irregularly shaped channels. The creation of these gaps was linked to an increase in the characteristic length of the non-uniform electrode structure, which can be described as a coarsening process. The transformation of the electrode's shape through surface/interface diffusion triggered the separation of the material connecting two holes. This separation was driven by instability induced by surface tension and stress, causing the material to form sharp points as it broke apart. These sharp points could potentially enhance the local electric field and lead to dielectric breakdown. An explanation was provided for the generation of defects arising from the arrangement of heterogeneous particles in the electrode layer.

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Keyword: X-ray nano computed tomography, multi-layer ceramic capacitors (MLCC), sintering, microstructure

Date published: 2024-07-15

Publisher: 一般社団法人 粉体粉末冶金協会

Journal:

  • 粉体および粉末冶金 Journal of the Japan Society of Powder and Powder Metallurgy (ISSN: 05328799) vol. 71 issue. 7 p. 251-256

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Manuscript type: Publisher's version (Version of record)

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First published URL: https://doi.org/10.2497/jjspm.23-00059

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Updated at: 2024-07-25 08:30:21 +0900

Published on MDR: 2024-07-25 08:30:22 +0900

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