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STEM in situ thermal wave observations for investigating thermal diffusivity in nanoscale materials and devices
Practical techniques to identify heat routes on the nanoscale are required for the thermal control of microelectronic, thermoelectric, and photonic devices. Nanoscale thermometry using various approaches has been extensively investigated, yet such a method has not been reported. We developed a method using thermal waves induced by a pulsed convergent electron beam in a scanning transmission electron microscopy (STEM) mode at room temperature. By quantifying the relative phase delay at each irradiated position, we could demonstrate the heat transport within the specimens with a spatial resolution of ~10 nm and temperature resolution of 0.01 K. Phonon-surface scatterings were quantitatively confirmed due to the suppression of thermal diffusivity. The phonon-grain boundary scatterings and ballistic phonon transport near the pulsed convergent electron beam could be visualized.
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- 12/01/2024
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sciadv.adj3825 (4).pdf | 5.83 MB | MDR Open |
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