電子分光法における表面感度と検出深さ

The four physical parameters describing inelastic scattering of electrons, which is a measure of surface sensitivity, were described. The definitions of the four parameters, namely, inelastic mean free path (IMFP), mean escape depth (MED), effective attenuation length (EAL), and information depth (ID), are given, and their determination methods and predictive equations were explained. Most of these equations are also applicable to hard X-ray photoelectron spectroscopy. At this time, the author concludes that IMFP and MED are the most appropriate parameters to describe surface sensitivity and detection depth from the standpoint of clarity of definition and practicality.