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[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
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A team at MANA has demonstrated a highly temperature-stable GaN resonator that boasts high-frequency stability, high Q factor and the potential for large-scale integration with silicon technology.
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- 19/12/2022
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[Vol. 68]New GaN MEMS Resonator Is Temperature-Stable up to 600 K_ WPI-MANA.pdf | 167 KB | MDR Open |
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