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surface roughness
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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
Description/Abstract:
We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
,
surface roughness
,
atomic force microscope
, and
depth resolution function
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
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Publication
1
Keyword
Auger depth profiling analysis
1
InP/GaInAsP multilayer specimens
1
atomic force microscope
1
depth resolution function
1
surface roughness
[remove]
1
Language
Japanese
1
Publisher
Surface Science Society of Japan
1
Resource type
Article
1
Visibility
open
1
Rights Statement Sim
In Copyright
1
Material/Specimen
InP/GaInAsP multilayer specimens
1
Author
OGIWARA, Toshiya
1
TANUMA, Shigeo
1
Journal
Journal of The Surface Science Society of Japan
1