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Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
Description/Abstract:
ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative ana...
Keyword:
AES
,
Auger electron spectroscopy
,
ISO
,
International Organization for Standardization
,
X-ray photoelectron spectroscopy
,
XPS
,
quantitative surface analysis
, and
relative sensitivity factor
Resource Type:
Article
Author:
TANUMA, Shigeo
Journal:
Surface and Interface Analysis
Date Uploaded:
08/10/2020
Date Modified:
01/07/2021
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Auger electron spectroscopy
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TANUMA, Shigeo
1
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http://rightsstatements.org/vocab/InC/1.0/
1
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Surface and Interface Analysis
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