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An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy

Description/Abstract:

The automatization of the atom probe tomography (APT) tip preparation using a focused ion beam (FIB) with a scanning electron microscopy ...

Keyword:

atom probe tomography, focused ion beam, and scanning electron microscopy

Resource Type:

Article

Author:

Jun Uzuhashi, Tadakatsu Ohkubo, and Kazuhiro Hono

Journal:

Microscopy and Microanalysis

Date Uploaded:

04/09/2024