Index Catalog // MDR

Skip to Content

Home
About
Help
Contact
Login

Search MDR

Search Constraints

Start Over

Filtering by: Keyword Ultra low angle incidence ion beam Remove constraint Keyword: Ultra low angle incidence ion beam Keyword HfO2/Si Remove constraint Keyword: HfO2/Si

1 - 8 of 8

relevance
date uploaded ▼
date uploaded ▲
date modified ▼
date modified ▲

Number of results to display per page

10 per page
20 per page
50 per page
100 per page

View results as:

List Gallery Masonry Slideshow

Search Results

Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

07/08/2023
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

13/07/2023

Date Modified:

07/08/2023
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

23/06/2023

Date Modified:

18/07/2023
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

29/05/2023

Date Modified:

26/06/2023
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiment

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

20/04/2023
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

09/02/2023

Date Modified:

30/03/2024
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

21/12/2022

Date Modified:

09/02/2023
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

22/11/2022

Date Modified:

30/05/2023

Limit your search

Type of work

Dataset8

Keyword

Auger depth profiling analysis8
HfO2/Si[remove]8
Ultra low angle incidence ion beam[remove]8

Publisher

National Institute for Materials Science7

Resource type

Dataset8

Visibility

open8

Rights Statement Sim

In Copyright8

Data origin

experiments7
experiment1

Characterization methods

spectroscopy8

Author

NAGATA, Takahiro8
OGIWARA, Toshiya8
YOSHIKAWA, Hideki8

National Institute for Materials Science

Research Network and Facility Services Division (RNFS)
Materials Data Platform

© 2020–2024 National Institute for Materials Science. Works are available under licenses specified on their pages.

Terms of Use
Privacy Policy
Data Platform DICE
NIMS Digital Library