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Nanofabrication
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[MANA E-BULLETIN Vol.6 - Feature] Advanced nano-fabrication technology catalyzing discovery and innovation at MANA
Description/Abstract:
Facilities for lithography and nanofabrication were established at NIMS in 2004 under the leadership of Masakazu Aono, the Director the I...
Keyword:
Characterization
,
Film Deposition
,
Lithography
,
Namiki Foundry
, and
Nanofabrication
Resource Type:
Article
Author:
International Center for Materials Nanoarchitectonics (WPI-MANA)
and
International Center for Materials Nanoarchitectonics (WPI-MANA)
Date Uploaded:
05/01/2023
Date Modified:
19/01/2023
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MANA E-BULLETIN
1
Keyword
Characterization
1
Film Deposition
1
Lithography
1
Namiki Foundry
1
Nanofabrication
[remove]
1
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English
1
Publisher
National Institute for Materials Science
1
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Article
1
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open
1
Rights Statement Sim
In Copyright
1
Author
International Center for Materials Nanoarchitectonics (WPI-MANA)
1