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Continuous real-time O 1s core XPS spectra of H2O adsorption on +c Ga-face and m-plane surfaces of GaN
Description/Abstract:
The surface oxidation behavior of different GaN surfaces (the polar Ga-face (+c) and the nonpolar m-plane) under H<sub>2</sub>O vapor amb...
Keyword:
GaN
,
Gallium nitride
,
MOS structure
,
Oxidation
,
SPring-8
,
Surface oxidation
, and
XPS
Resource Type:
Dataset
Data origin:
other
Author:
SUMIYA, Masatomo
Date Uploaded:
14/02/2023
Date Modified:
28/02/2023
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Keyword
GaN
1
Gallium nitride
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MOS structure
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Oxidation
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SPring-8
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NIMS
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Rights Statement Sim
Creative Commons BY Attribution 4.0 International
1
Data origin
other
1
Characterization methods
spectroscopy -- x-ray photoelectron spectroscopy
1
Author
SUMIYA, Masatomo
1