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Filtering by: Keyword Auger Depth Profiling analysis Remove constraint Keyword: Auger Depth Profiling analysis

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Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam

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Type of work

Publication1

Keyword

Auger Depth Profiling analysis[remove]1
HfO2/Si1
Ultra Low Angle Incidence Ion Beam1

Language

Japanese1

Publisher

Surface Analysis Society of Japan1

Resource type

Article1

Visibility

open1

Rights Statement Sim

In Copyright1

Material/Specimen

HfO21

Author

Nagata, Takahiro1
Ogiwara, Toshiya1
Yoshikawa, Hideki1

Journal

Journal of Surface Analysis1

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