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Argon Ion Spot Beam
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Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
Description/Abstract:
It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:
Auger Depth Profiling Analysis
,
Argon Ion Spot Beam
, and
InP/GaInAsP Multilayer Specimen
Material/Specimen:
InP/GaInAsP Multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
,
HARADA, Tomoko
, and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
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Publication
1
Keyword
Argon Ion Spot Beam
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1
Auger Depth Profiling Analysis
1
InP/GaInAsP Multilayer Specimen
1
Language
Japanese
1
Publisher
Surface Science Society of Japan
1
Resource type
Article
1
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open
1
Rights Statement Sim
In Copyright
1
Material/Specimen
InP/GaInAsP Multilayer
1
Author
HARADA, Tomoko
1
OGIWARA, Toshiya
1
TANUMA, Shigeo
1
Journal
Journal of The Surface Science Society of Japan
1