Index Catalog // MDR

Description/Abstract:: Recently Goto have done a precise measurement of transmission efficiency using a new method. Then, we have carried out the experimental d...
Keyword:: AES, IMFP, TPP-2M, and XPS
Resource Type:: Presentation
Author:: Tanuma，S, Okamoto, N, Azuma, Y, Kimura, T, and Goto, K
Date Uploaded:: 07/07/2023
Date Modified:: 07/07/2023

Description/Abstract:: AESによる表面定量分析において重要な電子の背面散乱について検討した．電子の背面散乱係数の入射角度依存性，およびそのエネルギーの平均値および中央値について，モンテカルロ(MC)法を用いてBe, B, C, Al, Si, Cu, Zr, Ag, La, Auの10種類の元素...
Keyword:: AES, Auger electron spectroscopy, electron backscattering correction, and predictive formula for back scattering correction
Resource Type:: Article
Author:: 田沼繁夫
Journal:: JOURNAL OF SURFACE ANALYSIS
Date Uploaded:: 29/06/2023

Description/Abstract:: ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative ana...
Keyword:: AES, Auger electron spectroscopy, ISO, International Organization for Standardization, X-ray photoelectron spectroscopy, XPS, quantitative surface analysis, and relative sensitivity factor
Resource Type:: Article
Author:: TANUMA, Shigeo
Journal:: Surface and Interface Analysis
Date Uploaded:: 08/10/2020
Date Modified:: 01/07/2021

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