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Determination of Inelastic Mean Free Paths in Elemental Solids in the 200 to 5000 eV Energy Range by Absolute Elastic Peak Electron Spectroscopy

Description/Abstract:

Recently Goto have done a precise measurement of transmission efficiency using a new method. Then, we have carried out the experimental d...

Keyword:

AES, IMFP, TPP-2M, and XPS

Resource Type:

Presentation

Author:

Tanuma，S, Okamoto, N, Azuma, Y, Kimura, T, and Goto, K

Date Uploaded:

07/07/2023

Date Modified:

07/07/2023
Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials

Description/Abstract:

ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative ana...

Keyword:

AES, Auger electron spectroscopy, ISO, International Organization for Standardization, X-ray photoelectron spectroscopy, XPS, quantitative surface analysis, and relative sensitivity factor

Resource Type:

Article

Author:

TANUMA, Shigeo

Journal:

Surface and Interface Analysis

Date Uploaded:

08/10/2020

Date Modified:

01/07/2021