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Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Description/Abstract:
We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...
Keyword:
Auger Depth Profiling Analysis
,
Inclined Holder
,
GaAs/AlAs Superlattice
, and
Si/Ge multiple delta-doped layers
Material/Specimen:
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagatomi, Takaharu
,
Kim, Kyung Joong
, and
Tanuma, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
08/09/2021
Date Modified:
08/09/2021
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
Description/Abstract:
半球型電子分光器を搭載したオージェ電子分光装置では,傾斜ホルダーを用いると装置のジオ メトリー特性との関係からイオン及び一次電子の入射角の自由度が大きくなる.特に試料回転の 回転軸が一次電子の入射方向と一致する場合は,傾斜ホルダーの回転角によってイオン入射角を 設定でき,電...
Keyword:
Auger Depth Profiling Analysis
,
Inclined Holder
,
GaAs/AlAs Superlattice
, and
Si/Ge multiple delta-doped layers
Material/Specimen:
GaAs/AlAs Superlattice
and
Si/Ge multiple delta-doped layers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagatomi, Takaharu
,
Kim, Kyung Joong
, and
Tanuma, Shigeo
Journal:
Journal of Surface Analysis
Date Uploaded:
14/06/2021
Date Modified:
18/06/2021
Calculations of electron inelastic mean free paths. X. Data for 41 elemental solids over the 50 eV to 200 keV range with the relativistic full Penn algorithm
Description/Abstract:
<h4>Abstract</h4> We have calculated inelastic mean free paths (IMFPs) for 41 elemental solids (Li, Be, graphite, diamond, glassy C, Na,...
Keyword:
electron inelastic mean free path
,
inelastic mean free paths
,
predictive equation for IMFP
,
elemental solid
,
relativistic Bethe equation
,
Fano plot
,
IMFP
,
ELF
,
energy loss function
,
optical constant
,
relativistic full Penn algorithm
,
full Penn algorithm
,
FPA
,
TPP-2M
, and
relativistic TPP-2M
Material/Specimen:
41 elemental solids (Li, Be, graphite, diamond, glassy C, Na, Mg, Al, Si, K, Sc, Ti, V, Cr, Fe, Co, Ni, Cu, Ge, Y, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Cs, Gd, Tb, Dy, Hf, Ta, W, Re, Os, Ir, Pt, Au, and Bi)
Resource Type:
Article
Author:
Shinotsuka, Hiroshi
,
TANUMA, Shigeo
,
Powell, Cedric J.
, and
Penn, David R.
Journal:
Surface and Interface Analysis
Date Uploaded:
01/04/2021
Date Modified:
19/07/2021
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Auger Depth Profiling Analysis
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GaAs/AlAs Superlattice
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Si/Ge multiple delta-doped layers
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Japanese
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Surface Analysis Society of Japan
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Rights Statement Sim
In Copyright
2
Creative Commons BY-NC Attribution-NonCommercial 4.0 International
1
Material/Specimen
41 elemental solids (Li, Be, graphite, diamond, glassy C, Na, Mg, Al, Si, K, Sc, Ti, V, Cr, Fe, Co, Ni, Cu, Ge, Y, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Cs, Gd, Tb, Dy, Hf, Ta, W, Re, Os, Ir, Pt, Au, and Bi)
1
GaAs/AlAs Superlattice
1
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
1
Si/Ge multiple delta-doped layers
1
Date accepted
2015
1
Author
Kim, Kyung Joong
2
Nagatomi, Takaharu
2
Ogiwara, Toshiya
2
Tanuma, Shigeo
2
TANUMA, Shigeo
1
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Journal
Journal of Surface Analysis
1
Journal of The Surface Science Society of Japan
1
Surface and Interface Analysis
1