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Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
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argon ion sputtering
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compound semiconductor
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surface observation using a scanning electron microscope
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Japanese
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Surface Analysis Society of Japan
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GaAs
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GaP
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GaSb
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Ogiwara, Toshiya
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Tanuma, Shigeo
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Journal of Surface Analysis
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