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Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

Description/Abstract:

We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...

Keyword:

Auger depth profiling analysis, GaAs/AlAs multilayer, non-negative least-square curve fit, and peak separation

Material/Specimen:

GaAs/AlAs multilayer

Resource Type:

Article

Author:

OGIWARA, Toshiya and TANUMA, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

01/10/2021

Date Modified:

01/10/2021