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Rapid measurement of low-order aberrations using Fourier transforms of crystalline Ronchigrams

Description/Abstract:

The aberrations of the objective lens should be measured and adjusted to realize high spatial resolution in scanning transmission electro...

Keyword:

Aberration, Ronchigram, STEM, and alignment

Resource Type:

Article

Author:

Koji Kimoto and Kazuo Ishizuka

Journal:

Ultramicroscopy

Date Uploaded:

02/08/2022

Date Modified:

03/08/2022