Index Catalog // MDR

Start Over

Filtering by: Journal Microscopy and Microanalysis

An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy

Description/Abstract:

The automatization of the atom probe tomography (APT) tip preparation using a focused ion beam (FIB) with a scanning electron microscopy ...

Keyword:

atom probe tomography, focused ion beam, and scanning electron microscopy

Resource Type:

Article

Author:

Jun Uzuhashi, Tadakatsu Ohkubo, and Kazuhiro Hono

Journal:

Microscopy and Microanalysis

Date Uploaded:

04/09/2024