Index Catalog // MDR

先端共用施設・技術プラットフォームの展望と課題 − ナノテクノロジープラットフォーム事業をベースとして −

Description/Abstract:: わが国の先端共用・技術プラットフォームの展望と課題を、ナノテクノロジープラットフォーム事業の実績と経験にもとづいて，１）現在まで達成されていること，２）解決し得ない構造的な問題，３）今後取り組むべき課題，４）将来へ向けた方向性について検討した。これにあたっては...
Keyword:: ナノテクノロジープラットフォーム事業の成果と課題, ナノテクノロジープラットフォーム事業の活動実績, 共用施策設計, 装置と知の共用, and 施設・装置の平等な利用機会
Resource Type:: Presentation
Author:: TANUMA, Shigeo
Date Uploaded:: 25/04/2022
Date Modified:: 10/05/2022

Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials

Description/Abstract:: ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative ana...
Keyword:: AES, Auger electron spectroscopy, ISO, International Organization for Standardization, X-ray photoelectron spectroscopy, XPS, quantitative surface analysis, and relative sensitivity factor
Resource Type:: Article
Author:: TANUMA, Shigeo
Journal:: Surface and Interface Analysis
Date Uploaded:: 08/10/2020
Date Modified:: 01/07/2021

First-principles calculations of optical constants

Description/Abstract:: The energy loss function (ELF) describes the interaction between electrons and matter in solids. It is essential for understanding quanti...
Keyword:: compound semiconductor, energy loss function, first-principles calculation, and optical constant
Resource Type:: Dataset
Data origin:: simulations
Author:: SHINOTSUKA, Hiroshi, YOSHIKAWA, Hideki, and TANUMA, Shigeo
Journal:: e-Journal of Surface Science and Nanotechnology
Date Uploaded:: 18/01/2021
Date Modified:: 07/07/2021

Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering

Description/Abstract:: We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...
Keyword:: Auger depth profiling analysis, InP/GaInAsP multilayer specimens, surface roughness, atomic force microscope, and depth resolution function
Material/Specimen:: InP/GaInAsP multilayer specimens
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

Analysis of electron inelastic scattering in solids over wide energy range and its application to surface chemical analysis

Description/Abstract:: We have, then, calculated IMFPs for 41 elemental solids and 30 semiconductors from 10 eV to 200 keV. These calculations were made with op...
Keyword:: EPES, HAXPES, IMFP, MED, electron inelastic scattering, energy loss function, and relativistic modified Bethe equation
Resource Type:: Presentation
Author:: TANUMA, Shigeo
Date Uploaded:: 29/06/2023

Electron Inelastic Mean Free Paths in Liquid Water for Energies from10 eV to 10 keV

Description/Abstract:: It is very important to know details of the interactions of low-energy electron with liquid water for many biological applications. There...
Keyword:: IMFP and liquid water
Resource Type:: Presentation
Author:: TANUMA, Shigeo, SHINOTSUKA, Hiroshi, DA, Bo, YOSHIKAWA, Hideki, and パウエル
Date Uploaded:: 29/06/2023

Inelastic Scattering of Electrons in Solids

Description/Abstract:: An overview is given of inelastic electron scattering in solids with an emphasis on calculations and measurements of electron inelastic m...
Keyword:: electrons, inelastic mean free path, and inelastic scattering
Resource Type:: Book
Author:: TANUMA, Shigeo and C. J. Powell
Date Uploaded:: 03/02/2023

Calculations and Measurements of Electron Inelastic Mean Free Paths in Solids

Description/Abstract:: We have calculated IMFPs for 41 elemental solids, 44 inorganic compounds and 12 organic compounds at equal energy intervals on a logarith...
Keyword:: ELF, EPES, FPA, Fano Plot, IMFP, and Mermin ELF
Resource Type:: Presentation
Author:: TANUMA, Shigeo
Date Uploaded:: 29/06/2023

Calculations of Electron Inelastic Mean Free Paths in Solids over the 10 eV to 200 keV Energy Range with the Relativistic Full Penn Algorithm

Description/Abstract:: We have calculated IMFPs for 41 elemental solids and 30 semiconductors at equal energy intervals on a logarithmic scale corresponding to ...
Keyword:: Fano Plot, IMFP, Mermin-type ELF , relativistic full Penn algorithm, and relativistic modified Bethe equation
Resource Type:: Presentation
Author:: Shinotsuka, H, TANUMA, Shigeo, Powell, C. J., and Penn, D. R.
Date Uploaded:: 29/06/2023

Energy Dependence of Electron Stopping Powers in Elemental Solids over the 100 eV to 30 keV Energy Range

Description/Abstract:: We analyzed the energy dependence of electron stopping powers (SPs) calculated for 41 elemental solids from experimental optical data for...
Keyword:: Electron stopping power, Elemental solids, Energy dependence, and Fano plo
Resource Type:: Article
Author:: KUMAGAI, kazuhiro, TANUMA, Shigeo, and C.J. Powell
Journal:: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Date Uploaded:: 29/05/2023

先端共用施設・技術プラットフォームの展望と課題 − ナノテクノロジープラットフォーム事業をベースとして −

Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials

First-principles calculations of optical constants

Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering

Analysis of electron inelastic scattering in solids over wide energy range and its application to surface chemical analysis

Electron Inelastic Mean Free Paths in Liquid Water for Energies from10 eV to 10 keV

Inelastic Scattering of Electrons in Solids

Calculations and Measurements of Electron Inelastic Mean Free Paths in Solids

Calculations of Electron Inelastic Mean Free Paths in Solids over the 10 eV to 200 keV Energy Range with the Relativistic Full Penn Algorithm

Energy Dependence of Electron Stopping Powers in Elemental Solids over the 100 eV to 30 keV Energy Range

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