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TANUMA, Shigeo
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Calculations of electron inelastic mean free paths.VIII. Data for 15 elemental solids over the 50-2000 eV range
Description/Abstract:
We report calculations of electron inelastic mean free paths (IMFPs) for 50 eV to 2000 eV electrons in 14 elemental solids (Li, Be, diamo...
Keyword:
IMFP
,
Li, Be, diamond, graphite, Na, K, Sc, Ge, In, Sn, Cs, Gd, Tb, Dy, Al
,
TPP-2M equation
,
electron inelastic mean free path
, and
rare-earth elements
Resource Type:
Article
Author:
TANUMA, Shigeo
,
C.J. Powell
, and
D.R. Penn
Journal:
SURFACE AND INTERFACE ANALYSIS
Date Uploaded:
29/05/2023
Date Modified:
30/05/2023
Energy Dependence of Electron Stopping Powers in Elemental Solids over the 100 eV to 30 keV Energy Range
Description/Abstract:
We analyzed the energy dependence of electron stopping powers (SPs) calculated for 41 elemental solids from experimental optical data for...
Keyword:
Electron stopping power
,
Elemental solids
,
Energy dependence
, and
Fano plo
Resource Type:
Article
Author:
KUMAGAI, kazuhiro
,
TANUMA, Shigeo
, and
C.J. Powell
Journal:
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Date Uploaded:
29/05/2023
Inelastic Scattering of Electrons in Solids
Description/Abstract:
An overview is given of inelastic electron scattering in solids with an emphasis on calculations and measurements of electron inelastic m...
Keyword:
electrons
,
inelastic mean free path
, and
inelastic scattering
Resource Type:
Book
Author:
TANUMA, Shigeo
and
C. J. Powell
Date Uploaded:
03/02/2023
先端共用施設・技術プラットフォームの展望と課題 − ナノテクノロジープラットフォーム事業をベースとして −
Description/Abstract:
わが国の先端共用・技術プラットフォームの 展望と課題を、ナノテクノロジープラットフォーム事業の実績と経験にもとづいて, 1) 現在まで達成されていること,2) 解決し得ない構造的な問題 ,3) 今後取り組むべき課題,4)将来へ向けた方向性について検討した。これにあたっては...
Keyword:
ナノテクノロジープラットフォーム事業の成果と課題
,
ナノテクノロジープラットフォーム事業の活動実績
,
共用施策設計
,
装置と知の共用
, and
施設・装置の平等な利用機会
Resource Type:
Presentation
Author:
TANUMA, Shigeo
Date Uploaded:
25/04/2022
Date Modified:
10/05/2022
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
Description/Abstract:
We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
,
surface roughness
,
atomic force microscope
, and
depth resolution function
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
Description/Abstract:
We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
, and
argon ion sputtering
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting
Description/Abstract:
We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...
Keyword:
Auger depth profiling analysis
,
GaAs/AlAs multilayer
,
non-negative least-square curve fit
, and
peak separation
Material/Specimen:
GaAs/AlAs multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
Description/Abstract:
It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:
Auger Depth Profiling Analysis
,
Argon Ion Spot Beam
, and
InP/GaInAsP Multilayer Specimen
Material/Specimen:
InP/GaInAsP Multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
,
HARADA, Tomoko
, and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
First-principles calculations of optical constants
Description/Abstract:
The energy loss function (ELF) describes the interaction between electrons and matter in solids. It is essential for understanding quanti...
Keyword:
compound semiconductor
,
energy loss function
,
first-principles calculation
, and
optical constant
Resource Type:
Dataset
Data origin:
simulations
Author:
SHINOTSUKA, Hiroshi
,
YOSHIKAWA, Hideki
, and
TANUMA, Shigeo
Journal:
e-Journal of Surface Science and Nanotechnology
Date Uploaded:
18/01/2021
Date Modified:
07/07/2021
Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
Description/Abstract:
ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative ana...
Keyword:
AES
,
Auger electron spectroscopy
,
ISO
,
International Organization for Standardization
,
X-ray photoelectron spectroscopy
,
XPS
,
quantitative surface analysis
, and
relative sensitivity factor
Resource Type:
Article
Author:
TANUMA, Shigeo
Journal:
Surface and Interface Analysis
Date Uploaded:
08/10/2020
Date Modified:
01/07/2021
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Auger depth profiling analysis
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InP/GaInAsP multilayer specimens
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Auger Depth Profiling Analysis
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Surface Science Society of Japan
4
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Creative Commons BY-NC Attribution-NonCommercial 4.0 International
3
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Creative Commons BY Attribution 4.0 International
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Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
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Computational methods
density functional theory or electronic structure
1
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simulations
1
Properties addressed
electrical -- dielectric constant and spectra
1
optical
1
Material/Specimen
InP/GaInAsP multilayer specimens
2
GaAs/AlAs multilayer
1
InP/GaInAsP Multilayer
1
Date created
2021
1
Author
TANUMA, Shigeo
10
OGIWARA, Toshiya
4
C.J. Powell
2
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1
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1
Journal
Journal of The Surface Science Society of Japan
4
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
1
SURFACE AND INTERFACE ANALYSIS
1
Surface and Interface Analysis
1
e-Journal of Surface Science and Nanotechnology
1