Index Catalog // MDR

Description/Abstract:: We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...
Keyword:: Auger depth profiling analysis, InP/GaInAsP multilayer specimens, surface roughness, atomic force microscope, and depth resolution function
Material/Specimen:: InP/GaInAsP multilayer specimens
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

Description/Abstract:: We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:: Auger depth profiling analysis, InP/GaInAsP multilayer specimens, and argon ion sputtering
Material/Specimen:: InP/GaInAsP multilayer specimens
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

Description/Abstract:: We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...
Keyword:: Auger depth profiling analysis, GaAs/AlAs multilayer, non-negative least-square curve fit, and peak separation
Material/Specimen:: GaAs/AlAs multilayer
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

Description/Abstract:: It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:: Auger Depth Profiling Analysis, Argon Ion Spot Beam, and InP/GaInAsP Multilayer Specimen
Material/Specimen:: InP/GaInAsP Multilayer
Resource Type:: Article
Author:: OGIWARA, Toshiya, HARADA, Tomoko, and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

Description/Abstract:: ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative ana...
Keyword:: AES, Auger electron spectroscopy, ISO, International Organization for Standardization, X-ray photoelectron spectroscopy, XPS, quantitative surface analysis, and relative sensitivity factor
Resource Type:: Article
Author:: TANUMA, Shigeo
Journal:: Surface and Interface Analysis
Date Uploaded:: 08/10/2020
Date Modified:: 01/07/2021

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