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Tanuma, Shigeo
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Calculations of electron inelastic mean free paths. XII. Data for 42 inorganic compou...
Calculations of Mean Escape Depths of Photoelectrons in Elemental Solids Excited by Li...
電子線マイクロアナライザーによるMg-Ge合金の定量 -Mg Kαに対するGeの質量吸収係数の検討- and Electron microprobe analysis of...
Calculations of Electron Inelastic Mean Free Paths. XI. Data for Liquid Water for Ener...
InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Hol...
試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告(I)
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at th...
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Keyword
IMFP
7
Auger Depth Profiling Analysis
6
electron inelastic mean free paths
5
TPP-2M
4
Electron Inelastic Mean Free Path
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Language
English
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Japanese
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日本語
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Surface Analysis Society of Japan
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Wiley
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Elsevier
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John Wiley and Sons, Ltd.
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In Copyright
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Creative Commons BY-NC Attribution-NonCommercial 4.0 International
6
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
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Material/Specimen
C (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au
1
26-n-paraffin
1
GaAs
1
GaAs/AlAs Superlattice
1
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
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Date accepted
2002
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2004
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2017
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Date submitted
2021
1
Author
Tanuma, Shigeo
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18
Ogiwara, Toshiya
7
Shinotsuka, Hiroshi
4
Penn, D. R.
3
Powell, C. J.
3
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https://creativecommons.org/licenses/by-nc-nd/4.0/
4
Journal
Journal of Surface Analysis
6
SURFACE AND INTERFACE ANALYSIS
4
Surface and Interface Analysis
4
Journal of The Surface Science Society of Japan
2
Journal of Electron Spectroscopy and Related Phenomena
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