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Filtering by: Author Tanuma, Shigeo Journal Journal of The Surface Science Society of Japan Type of work Publication

Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

Description/Abstract:

We have investigated the Auger depth profiling analysis of InP/GaInAsP multilayer specimens. It is difficult to obtain the Auger depth pr...

Keyword:

Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, and Sample Cooling Method

Material/Specimen:

InP/GaInAsP Multilayers

Resource Type:

Article

Author:

Ogiwara, Toshiya, Tanuma, Shigeo, Nagasawa, Yuji, and Ikeo, Nobuyuki

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

09/09/2021

Date Modified:

09/09/2021
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

Description/Abstract:

We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...

Keyword:

Auger Depth Profiling Analysis, Inclined Holder, GaAs/AlAs Superlattice, and Si/Ge multiple delta-doped layers

Material/Specimen:

GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers

Resource Type:

Article

Author:

Ogiwara, Toshiya, Nagatomi, Takaharu, Kim, Kyung Joong, and Tanuma, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

08/09/2021

Date Modified:

08/09/2021