Skip to Content
Toggle navigation
Home
About
Help
Contact
Login
Search MDR
Go
Search Constraints
Start Over
Filtering by:
Author
TANUMA, Shigeo
Remove constraint Author: TANUMA, Shigeo
Keyword
Auger depth profiling analysis
Remove constraint Keyword: Auger depth profiling analysis
1
-
3
of
3
Sort by relevance
relevance
date uploaded ▼
date uploaded ▲
date modified ▼
date modified ▲
Number of results to display per page
10 per page
10
per page
20
per page
50
per page
100
per page
View results as:
List
Gallery
Masonry
Slideshow
Search Results
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
Description/Abstract:
We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
,
surface roughness
,
atomic force microscope
, and
depth resolution function
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
Description/Abstract:
We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
, and
argon ion sputtering
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting
Description/Abstract:
We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...
Keyword:
Auger depth profiling analysis
,
GaAs/AlAs multilayer
,
non-negative least-square curve fit
, and
peak separation
Material/Specimen:
GaAs/AlAs multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Toggle facets
Limit your search
Type of work
Publication
3
Keyword
Auger depth profiling analysis
[remove]
3
InP/GaInAsP multilayer specimens
2
GaAs/AlAs multilayer
1
argon ion sputtering
1
atomic force microscope
1
more
Keywords
»
Language
Japanese
3
Publisher
Surface Science Society of Japan
3
Resource type
Article
3
Visibility
open
3
Rights Statement Sim
In Copyright
3
Material/Specimen
InP/GaInAsP multilayer specimens
2
GaAs/AlAs multilayer
1
Author
OGIWARA, Toshiya
3
TANUMA, Shigeo
[remove]
3
Journal
Journal of The Surface Science Society of Japan
3