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SUMIYA, Masatomo
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XPS spectral data for p- and n-type Si wafers with various resistivities acquired at SPring-8 BL15
Description/Abstract:
Siウェハーおよび測定条件の違いによるXPSスペクトルの変化を測定したXPSスペクトルデータセット。SPring-8 BL15で測定。「試料名、抵抗率、X線アナライザー角度、ID」の構造でフォルダ分けされている(ただしAuでは「試料名、X線アナライザー角度、ID」)。本デー...
Keyword:
SPring-8 BL15
,
Si
, and
XPS
Resource Type:
Dataset
Data origin:
experiments
Author:
SUMIYA, Masatomo
Date Uploaded:
23/05/2024
Continuous real-time O 1s core XPS spectra of H2O adsorption on +c Ga-face and m-plane surfaces of GaN
Description/Abstract:
The surface oxidation behavior of different GaN surfaces (the polar Ga-face (+c) and the nonpolar m-plane) under H<sub>2</sub>O vapor amb...
Keyword:
GaN
,
Gallium nitride
,
MOS structure
,
Oxidation
,
SPring-8
,
Surface oxidation
, and
XPS
Resource Type:
Dataset
Data origin:
other
Author:
SUMIYA, Masatomo
Date Uploaded:
14/02/2023
Date Modified:
28/02/2023
Continuous real-time O 1s core XPS spectra of initial O2 molecule adsorption on polar and m-plane surfaces of GaN
Description/Abstract:
The initial adsorption behavior of different GaN surfaces (the polar Ga-face (+c) and N-face (−c) and the nonpolar (101̅0) (m)-plane) und...
Keyword:
Adsorption
,
GaN
,
Gallium nitride
,
Oxidation
,
SPring-8
, and
XPS
Resource Type:
Dataset
Data origin:
other
Author:
SUMIYA, Masatomo
Date Uploaded:
31/01/2023
Date Modified:
28/02/2023
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XPS
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GaN
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NIMS
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National Institute for Materials Science
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3
Rights Statement Sim
Creative Commons BY Attribution 4.0 International
2
Creative Commons BY-NC Attribution-NonCommercial 4.0 International
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2
experiments
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Characterization methods
spectroscopy -- x-ray photoelectron spectroscopy
2
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Author
SUMIYA, Masatomo
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