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OGIWARA, Toshiya
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argon ion sputtering
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Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
Description/Abstract:
We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
, and
argon ion sputtering
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
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1
Keyword
Auger depth profiling analysis
1
InP/GaInAsP multilayer specimens
1
argon ion sputtering
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1
Language
Japanese
1
Publisher
Surface Science Society of Japan
1
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Article
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1
Material/Specimen
InP/GaInAsP multilayer specimens
1
Author
OGIWARA, Toshiya
[remove]
1
TANUMA, Shigeo
1
Journal
Journal of The Surface Science Society of Japan
1