Skip to Content
Toggle navigation
Home
About
Help
Contact
Login
Search MDR
Go
Search Constraints
Start Over
Filtering by:
Author
OGIWARA, Toshiya
Remove constraint Author: OGIWARA, Toshiya
Author
YOSHIKAWA, Hideki
Remove constraint Author: YOSHIKAWA, Hideki
1
-
8
of
8
Sort by relevance
relevance
date uploaded ▼
date uploaded ▲
date modified ▼
date modified ▲
Number of results to display per page
10 per page
10
per page
20
per page
50
per page
100
per page
View results as:
List
Gallery
Masonry
Slideshow
Search Results
Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
07/08/2023
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
13/07/2023
Date Modified:
07/08/2023
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
23/06/2023
Date Modified:
18/07/2023
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
29/05/2023
Date Modified:
26/06/2023
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiment
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
20/04/2023
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
09/02/2023
Date Modified:
30/03/2024
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
21/12/2022
Date Modified:
09/02/2023
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
22/11/2022
Date Modified:
30/05/2023
Toggle facets
Limit your search
Type of work
Dataset
8
Keyword
Auger depth profiling analysis
8
HfO2/Si
8
Ultra low angle incidence ion beam
8
Publisher
National Institute for Materials Science
7
Resource type
Dataset
8
Visibility
open
8
Rights Statement Sim
In Copyright
8
Data origin
experiments
7
experiment
1
Characterization methods
spectroscopy
8
Author
NAGATA, Takahiro
8
OGIWARA, Toshiya
[remove]
8
YOSHIKAWA, Hideki
[remove]
8
