Index Catalog // MDR

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 21/12/2022
Date Modified:: 23/12/2022

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 22/11/2022
Date Modified:: 23/12/2022

Description/Abstract:: The prediction performance of the automatic threshold estimation of photoelectron yield spectroscopy using machine learning and least squ...
Keyword:: machine learning, photoelectron yield spectroscopy, and threshold
Resource Type:: Other, Software or Program Code, and Article
Author:: YAGYU, Shinjiro, YOSHITAKE, Michiko, CHIKYOW, Toyohiro, and NAGATA, Takahiro
Journal:: 表面と真空
Date Uploaded:: 30/06/2020
Date Modified:: 02/07/2021

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